PROFILE
- Name : Pahk, Heui Jae
- Position : Professor
- Tel. : +82-2-880-7467
- FAX : +82-2-875-8955
- Location : Bd.301 R.1521
- E-Mail : hjpahk@snu.ac.kr
- Homepage : http://metrol.snu.ac.kr
- Lab Name : Precision Metrology and Mechatronics Laboratory
- Lab Location(Tel.) : Bd.301 R.1314, Bd.301 R.1356(+82-2-880-1680)
EDUCATION
- 1979-1983: BSc, Seoul National University, Mechanical Design and Production Eng
- 1983-1985: MSc, Seoul National University, Mechanical Design and Production Eng
- 1987-1990: Doctor of Philosophy (PhD), Univ. of Manchester (UK)
- 2019 : Higher Doctorate in Engineering (DEng), Univ. of Manchester(UK)
CAREER
- 1993.9-Present: Full/Associate/Assistant Professor, Mechanical Engineering, SNU
- 2020.12-Present: Director, Institute of Machines and Design, SNU
- 2020.11-Present: Chief, AI Valley Bureau, SNU
- 2002-Present: Director, Industry-University Research Center, SNU
- 2022.9-Present: SNU-HD InfraCore endowed chair Professor
- 2010.3-Present: Full/Junior Member, National Academy of Engineering Korea
- 1998.2-2017.1: Founder and CEO, SNU Precision (The First SNU Engineering Startup)
- 2013.4-2017.4: President, Office of Strategic R&D Planning, Ministry of Trade Industry and Energy
- 2016.7-2018.1: Chairman, Youth Foundation
- 2017.3-2023.4: Chairman, Korean Association for Industrial Technology Security
- 1991.3-1993.8: Assistant Professor, Pohang University of Science and Technology
RESEARCH FIELD
- Precision Metrology and Mechatronics System
- Semiconductor/Display Metrology
- Ellipsometry/Interferometry/Reflectometry
AWARD
- 2004: Order of Silver Tower Industrial Merit (President)
- 2015: Export Tower for 70 Million USD (President)
- 2004/2013: IR52 Jang Young Sil Award (Ministry of Science and Technology)
- 2006: Award of Scientist Model (Ministry of Science and Technology)
- 2006: Award of Young Engineer (National Academy of Engineering Korea)
- 2010: 100 Technology Award (National Academy of Engineering Korea)
- 2013: The 1st Paik Nam Prize Award in Engineering (Hanyang University)
- 2009/2011: Award of Hidden Champion (Korea Exchange))
- 2014: Forbes Korea Global CEO Award (Forbes Korea)
- 2005: Award of Development and Contribution, SNU Engineering
- 2006 Award of Gwanak Grand Prize, SNU Alumni Association
- 2020 Award of Excellent Engineering Professor, SNU
- 2020 Award of Development and Contribution, SNU
MAIN PUBLICATION (top3)
- Angle-resolving spectral ellipsometry using structured light for direct measurement of ellipsometric parameters, Applied Optics, Vol.62, No.30/20, October 2023, 8082-8090
- Coaxial spectroscopic snapshot ellipsometry for real time thickness measurements with a small spot size, Optics Express, Vol.28, No.18/31, August 2020, 25879-25893
- Single sequence phase shifting spectrally resolved interferometry for an in-line thin film thickness measurement using spectral reflectance and phase, Applied Optics, Vol.60, No.30/20, October 2021, 9425-9431
Accomplishments
- About 200 Papers in Refereed Journal and Proceedings
- About 150 Patents; About 110 R&D Contract Projects
- Supervising about 100 PhD/MSc graduates
- ‘Mechanical Measurement’ Text book (Translation), ‘Time of Accumulation’ (Coauthor)
