Department News
NanoTurf - A Nano-engineered Surface:Design, Fabrication, and Application to Microfluidics and Biote
Seminar Date
2005-05-31
Author
빈종훈
Date
2005-05-31
Views
1850
1. 제 목 : NanoTurf - A Nano-engineered Surface:
Design, Fabrication, and Application to Microfluidics and Biotechnology
2. 연 사 : ph.D. Chang-Hwan Choi
3. 일 시 : 2005년 6월 14일 (화) 오전 11:00 – 12:00
4. 장 소 : 서울대 301동 117호
5. 내 용 :
While several nano-scale patterning techniques are available, it should be noted that serial lithography methods such as e-beam lithography and scanning probe lithography do not cover a large area needed for non-electronic applications. Other non-lithographic methods, for example, the use of nano-templates such as copolymers, nano-spheres, S-layer proteins, and a porous anodic alumina membrane, or the direct growth of nano-scale structures such as carbon nano-tubes, do not provide good regularity over a large area. Comparatively, interference (or holographic) lithography is a relatively simple way to make submicron-scale patterns over a large area with superior control of pattern regularity and practically unlimited depth of focus. We report a simple but effective method to fabricate high-aspect-ratio silicon nanostructures using interference lithography followed by deep reactive ion etching (DRIE). Sidewall profiles of nano-grating and nano-post patterns are controlled through etching parameters of DRIE. We also show that tips with a pointed and re-entrant profile can be created.
The proposed nanofabrication method to control the sidewall profiles and to sharpen the tips over a large pattern area opens new application possibilities not only in electronics but also in other engineering and general areas. As the first example, a large slip effect and the corresponding drag reduction of liquid flow by using the super-hydrophobic nanostructures will be demonstrated. As the second, the control of cell behavior by using the combined effects of the surface topography and chemistry of the nanostructures will be briefly introduced, which is currently investigated.
6. 약 력 :
2005 - Ph. D. Mechanical Engineering, University of California, Los Angeles (UCLA), USA
2002 - M. S. Mechanical Engineering, Brown University, Providence, RI, USA
2000 - Management Planning Team, Sungwoo Ecom, Seoul, Korea
1999 - 2000 Researcher, Korea Aerospace Research Institute, Daejon, Korea
1997 - 1999 Lecturer/Overseas Volunteer, Rajabhat Institute Chandrakasem,
Bangkok, Thailand
1997 - M. S. Aerospace Engineering, Seoul National University, Seoul, Korea
1995 - B. S. Aerospace Engineering, Seoul National University, Seoul, Korea
7. 문 의 : 기계항공공학부 김 종 암 (☏ 880-1915)
Design, Fabrication, and Application to Microfluidics and Biotechnology
2. 연 사 : ph.D. Chang-Hwan Choi
3. 일 시 : 2005년 6월 14일 (화) 오전 11:00 – 12:00
4. 장 소 : 서울대 301동 117호
5. 내 용 :
While several nano-scale patterning techniques are available, it should be noted that serial lithography methods such as e-beam lithography and scanning probe lithography do not cover a large area needed for non-electronic applications. Other non-lithographic methods, for example, the use of nano-templates such as copolymers, nano-spheres, S-layer proteins, and a porous anodic alumina membrane, or the direct growth of nano-scale structures such as carbon nano-tubes, do not provide good regularity over a large area. Comparatively, interference (or holographic) lithography is a relatively simple way to make submicron-scale patterns over a large area with superior control of pattern regularity and practically unlimited depth of focus. We report a simple but effective method to fabricate high-aspect-ratio silicon nanostructures using interference lithography followed by deep reactive ion etching (DRIE). Sidewall profiles of nano-grating and nano-post patterns are controlled through etching parameters of DRIE. We also show that tips with a pointed and re-entrant profile can be created.
The proposed nanofabrication method to control the sidewall profiles and to sharpen the tips over a large pattern area opens new application possibilities not only in electronics but also in other engineering and general areas. As the first example, a large slip effect and the corresponding drag reduction of liquid flow by using the super-hydrophobic nanostructures will be demonstrated. As the second, the control of cell behavior by using the combined effects of the surface topography and chemistry of the nanostructures will be briefly introduced, which is currently investigated.
6. 약 력 :
2005 - Ph. D. Mechanical Engineering, University of California, Los Angeles (UCLA), USA
2002 - M. S. Mechanical Engineering, Brown University, Providence, RI, USA
2000 - Management Planning Team, Sungwoo Ecom, Seoul, Korea
1999 - 2000 Researcher, Korea Aerospace Research Institute, Daejon, Korea
1997 - 1999 Lecturer/Overseas Volunteer, Rajabhat Institute Chandrakasem,
Bangkok, Thailand
1997 - M. S. Aerospace Engineering, Seoul National University, Seoul, Korea
1995 - B. S. Aerospace Engineering, Seoul National University, Seoul, Korea
7. 문 의 : 기계항공공학부 김 종 암 (☏ 880-1915)
