1. 제목 : Coupled Resonator-Substrate Model


for the Loss Evaluation of High-Q MEMS Resonators


2. 연사 : Professor K. C. Park (University of Colorado at Boulder, U.S.A.)


3. 일시 : 2001년 11월 14일 (수요일) 오전 11시


4. 장소 : 301동 1512호 세미나실


5. 내용 :


Energy loss in microsystems is known to cause severely their performance degradations. For example, MEMS resonators that have been proposed to compete with the present microelecronic resonators in devices such as cell phones must overcome Q-factor loss due to various mechanical energy loss sources. In this lecture, energy loss in MEMS resonators due to mechanical vibrations have been studied via a coupled model of resonator beams and multi-layered silicon compound substrate on which resonator is anchored. The overall vibration model is achieved by coupling the independent models of resonator and substrates through interface conditions. The resulting coupled model is then used to identify vibration energy transmissions from resonator through anchor to substrate, viz., anchor loss. The present model shows that the anchor loss is primarily dictated by dynamic coupling between the vibration modes of the resonator and the surface wave propagation characteristics of the subtrate. The present coupled beam-substrate model has been used to gain insight into the sensitivity of design changes on the filter characteristics.





6. 연사약력 :


1970 Stanford University, M.S.


1974 Clarkson College, Ph.D.


1973-1985 Senior Staff Scientist at Lockheed's Palo Alto Research Laboratory.


1985-present Professor, Department of the Aerospace Engineering Science,


University of Colorado at Boulder.





7. 연락처 : 기계항공공학부 김용협 교수 (전화 : 880-7385)