1. 주제 : Micromachined tools for investigation of nanoworld





2. 연사 : 김범준 박사





3. 일시 : 2000년 12월 28일 오후 1시 30분(1시간)





4. 장소 : 301동 1512호





5. 내용 :


This talk presents the introduction of CIRMM (Center for International Research on MicroMechatronics), University of Tokyo, to facilitate international collaboration on micromechatronics research, which is the study of micro miniature systems composed of mechanical, electrical, optical, and bio/chemical devices. This prospect is to obtain new functions and superior performance through the fusion of devices working with different principles.


The study includes (1) fabrication technologies based on both semiconductor processes and mechanical machining, (2) basic components such as actuators, (3) integration and packaging technologies and (4) applications especially in optics, biomedical systems and nano technologis. International research networks on micro systems are constructed based on the five-year experience of LIMMS: the joint research laboratory between IIS in University of Tokyo and SPI in CNRS. Finally, He introduced two research projects about micro- fabricated probes for Near-field optical applications and Dry-lift off patterning on fragile surfaces using MEMS shadow masks.





6. 문의처 : 기계항공공학부 주종남 교수 (880-7136)