1. 제목 : Microactuation by Continuous Electrowetting: Theory and


Fabrication





2. 연사 : Junghoon Lee





3. 일시 : 1999년 10월8일(금요일) 11:00





4. 장소 : 301동 1512호





5. 내용 :


We demonstrate for the first time that continuous electrowetting, actuation by an electrically controlled surface tension, can be used as a serious microactuation mechanism which typically employs lithographic planar micromachining process. Described is the development of microdevices where a slug of liquid metal is driven by the continuous electrowetting, including theoretical studies, designs, fabrication, testing, and applications. We study science bases combining electrochemistry, thermodynamics, and fluid mechanics leading to mathematical model to predict speed of motion. Key enabling techniques and design features were identified for successful application of this powerful surface-tension driving principle for MEMS. Technical issues in the developing procedure are examined and discussed, which includes the problem of material compatibility, polarization, and electrolysis. Based on those considerations, we proposed a unique design concept that allows long-range travel of the liquid metal slug. The liquid micromotor demonstrated a continuous circular motion in microchannel loop. It showed smooth and wear-free rotation of the liquid metal slug at a speed of 420 rpm (for 2-mm diameter loop) with a driving voltage of only 2.8 V and very little power consumption, below 30 mW. Possible area of application includes micropump, micro optical switch, and micro momentum wheel.





6. 연사 약력 :


Ph.D. candidate in Mechanical and Aerospace Engineering department, UCLA.





B.S. degree in mechanical engineering from Seoul National University


in 1989





M.S. degree in control engineering from the same university in 1991.





worked for Agency for Defense Development, Korea from 1991 to 1996 as a research engineer.





7. 연락처 : 기계항공공학부 이교일 교수 (전화 : 880-7135)